When your wafer clamping slips or damages a wafer, the whole process can be lost and costly. The Electrostatic Chuck Power Supply holds semiconductor wafers firmly with precise high-voltage control, preventing movement and breakage. It delivers stable bipolar voltage so you can concentrate on processing, not on keeping the wafer in place.
Matsusada Electrostatic Chuck Power Supply
Many buyers worry about voltage instability and slow polarity changes that cause uneven clamping. This supply removes those doubts with a fast 90 ms response and reliable bipolar output from 0.5 kV to ±7.5 kV, keeping each channel steady even when running two chucks simultaneously. The built-in RF filter and multiple digital interfaces further ensure consistent performance in demanding lab environments.
Key Features of a 7.5kV Electrostatic Chuck Power Supply
- Output voltage range: 0.5 kV to ±7.5 kV. Provides the flexibility to set the exact holding force you need.
- Output current: 1.2 mA per channel. Sufficient for stable electrostatic attraction without overheating.
- Channels: 2 independent high-voltage outputs. Lets you run two chucks at once, boosting throughput.
- Power class: Approx. 10 W. Delivers enough energy for reliable operation while staying energy-efficient.
- Response time: ~90 ms for the 7.5 kV model. Enables quick polarity switching for fast chuck/de-chuck cycles.
- Polarity control: Chuck / de-chuck switching. Allows seamless transition between holding and releasing wafers.
- Interfaces: LAN, USB, RS-232C. Gives you versatile options for remote control and integration.
- RF filter: Built-in 13.56 MHz filter. Protects the supply from external radio interference.
- Form factor: Benchtop half-rack compact design. Fits easily on a lab bench without taking up much space.
- Optional wafer sensing: Monitoring function available. Adds an extra layer of safety by detecting wafer presence.
Usages of a 7.5kV Electrostatic Chuck Power Supply
Ideal for semiconductor fabs, research labs and pilot lines that need reliable wafer handling, especially when running multiple electrostatic chucks or requiring fast polarity reversal to keep production moving smoothly.
Benefits of Matsusada Electrostatic Chuck Power Supply
- Stability: Consistent voltage reduces scrap and re-work.
- Speed: Quick response saves cycle time and increases output.
- Flexibility: Two channels let you process more wafers simultaneously.
- Control: Multiple digital interfaces simplify remote monitoring and automation.
- Longevity: Built-in RF filter and robust design extend service life and lower maintenance costs.
Specifications
| General Information |
|
| Model |
HECD-7.5B1.2×2 |
| Series |
HECD Series |
| Manufacturer |
Matsusada Precision |
| Product Type |
Electrostatic Chuck High Voltage Power Supply |
| Output Specifications |
|
| Output Voltage |
0.5 kV to ±7.5 kV (bipolar output) |
| Output Current |
1.2 mA (per channel) |
| Output Channels |
2 channels (2CH independent output) |
| Output Power |
Approx. class 10 W (series range 4–10 W) |
| Polarity |
Bipolar (positive/negative switching) |
| Response Time |
~90 ms (typical for 7.5 kV model) |
| Control & Monitoring |
|
| Control Function |
Chuck / De-chuck polarity switching |
| Monitoring |
Wafer sensing function (optional feature in series) |
| Interfaces & Communication |
|
| Interface |
LAN / USB / RS-232C (digital interface standard) |
| RF Filter |
Built-in RF filter (13.56 MHz support) |
| Power & Form Factor |
|
| Input Voltage |
AC 100–240 V |
| Form Factor |
Benchtop half-rack compact design |
| Application & Features |
|
| Application |
Semiconductor wafer electrostatic chuck systems |
| Features |
Fast polarity reversal, high stability HV output |
